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How a FIB-SEM works
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substack.com
Using focused ion beam scanning electron microscopy (FIB-SEM), samples are imaged with the SEM before a focused ion beam mills away as little as 3-10 nm. The sample is then imaged again and the process is repeated to build up a high-resolution view of the complete 3D volume. Cryogenic FIB-SEM generates these volumes from vitrified samples and enables the capture of 3D ultraresolution in the near native state. The video illustrates a typical cryogenic FIB-SEM workflow. Learn more about cryogenic
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비디오: 집속 이온 빔 FIB-SEM: 밀링 및 이미징
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realself.com
A TEM lamella of an SRAM was prepared using a FIB-SEM. The lamella was thinned down to a thickness of 50 nm and various STEM images were observed on the FIB-SEM equipped with a STEM detector. BF-STEM image shows the crystal structure of Poly-Si region and surrounding structures. MADDF-STEM image highlights the barrier metal around the W plug. HAADF-STEM image provides Z-contrast according to the average atomic number. Several nm thick gate oxide layer was clearly observed at higher magnification
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