With a modulation frequency of 50 kHz the phase modulated ellipsometer can work with response times as short as 1ms/point, and with good signal : noise ratio. This makes the instrument the ideal ...
a, Schematics of a conventional spectroscopic ellipsometry system. b, Schematics of a metasurface array-based single-shot spectroscopic ellipsometry system. The metasurface array-based system for ...
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