Researchers have used an extremely bright mid-infrared laser to perform an analytical technique known as spectroscopic ellipsometry. The new approach captures high-resolution spectral information in ...

One of the biggest challenges for nanoscale fabrication is how to measure devices on such a minute scale. As the semiconductor industry demands ever smaller devices, the need for reliable, robust ...

Spectroscopic ellipsometry based on photoelastic modulation delivers very high accuracy and repeatability. Owing to this technology the UVISEL allows the unique combination of high performance and ...

The Ellipsometry is a total optical measurement method. This technique is used to measure the change of polarization of light when passing through a medium. Due to the layer structure during ...