Multiphoton lithography (often called multiphoton 3D lithography) is an additive manufacturing approach for fabricating intricate micro- and nanostructures. It relies on nonlinear optical absorption, ...
The following article was provided to EE Times by Akiyoshi Suzuki, senior manager with the Core Technology Development Group at Canon Inc. in Tokyo. Lithography for the 65-nm and 45-nm technology ...
Researchers detail how they used a type of 3D printing known as two-photon lithography to create lenses that combine refractive and diffractive surfaces. In a new study, researchers have shown that 3D ...
An optical method for mask alignment in double-sided lithography has been developed by a team at the University of Hagen in Germany (Appl. Opt. 40 5052). The technique, which is based on the ...
Recognition of decades-long commitment to the semiconductor industry. Oberkochen, Germany / San José, USA -- Winfried Kaiser, head of Product Strategy of ZEISS Semiconductor Manufacturing Technology ...
It provides translational motion of 5 mm in both X and Y, along with rotational motion around the Z axis of 2°. Applications The A-361 PIglide XY-theta stage is particularly well suited for wafer ...
GARCHING, Germany & WINDACH, Germany--(BUSINESS WIRE)--SUSS MicroTec and DELO cooperate in the optimization of imprint manufacturing processes for the production of wafer-level optics (WLO). These ...
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