Logic semiconductor manufacturers plan to replace FinFET devices with Gate All Around at sub-3nm nodes. Applied Materials has introduced a complex seven chamber system with Atomic Layer Deposition as ...
Veeco Instruments has announced that it has shipped its Spector Ion Beam Sputtering (IBS) system and Sirius Optical Monitor System to the Fraunhofer Institute for Telecommunications (HHI). The ...
A review of Ion Beam technology is presented in this paper. The key applications and benefits of using ion beam technology for etching processes in comparison to technology such as plasma etching will ...
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